Thermal expansion coefficient of hydrogenated amorphous carbon
نویسندگان
چکیده
The coefficient of thermal expansion ~CTE! of hydrogenated amorphous carbon (a-C:H) was investigated as a function of the concentration of sp hybridization. The CTE, determined using the thermally induced bending technique, depends on the concentration of sp bonded carbon, increasing to the value of graphite as the sp concentration approaches 100%. By using a combination of the thermally induced bending technique and nanohardness measurements, we extract separately the Young’s modulus and Poisson’s ratio of the a-C:H films as function of the sp concentration. © 2003 American Institute of Physics. @DOI: 10.1063/1.1619557#
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